Precision Spares, LLC
We are a second-source parts supplier for Semiconductor & other Industries. Currently we offer more than 1000 brand new second-source spares for LAM, Varian, Tegal, TEL, AMAT, Gasonics, Novellus, & Mattson.

Type of parts we offer include
• o-rings, ceramics, quartz, sapphire, consumables,
• filters, bearings,
• gauges, instruments,
• Machined parts, plastic parts, weldments, and cables.

We offer following services
- Used/refurbished equipments,
- PCB repair,
- Refurbish susceptors
- Refurbished/used pumps,
- Refurbished/used RF generators, and
- Refurbished Mass Flow Controllers / Liquid Flow Controllers.

We can provide PM Kits, Custom Kits, and custom inventory management programs.

We will appreciate, if we get an opportunity to help you out with any of our services.
Precision Spares, LLC
512 203 5098
512 722 7737